VSA Wafer Tester



  • Examine the frequency characteristics of the wafer using a vector frequency analyzer on the production line.
  • Multiple voltage output setting is possible.

Programming Language: LabVIEW


  • Being compact with introduction of PXI system.
  • Reduced measurement time due to flexibility of measurement conditions.
  • Calibration function of power sensor.
  • The result of the previous process can be reviewed.
  • Output the results necessary for the next process.


  • PXIe-1078 chassis
  • PXIe-8135 controller
  • PXIe-5644R vector frequency analyzer
  • PXIe-4144 Source Mesure Unit(SMU)
  • Prober, Power Meter, signal source